Class 10,000 Cleanroom
 NANOTECH @ WFU
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4NANOTECH maintains a 1000 sq. ft. "clean room facility" for organic device fabrication.  Located at the Deacon Blvd. site, this class 10,000 facility is fully outfitted for the fabrication and testing of organic devices including OLEDs, OPVs, electrochromic devices, organic transitors, and other flexible electronics and photonics. 

The laboratory was established with funding through a generous grant from the Yazaki Meter Company in Japan.

Access to the facility requires a brief training period and introduction to safe wet chemical procedures. Gown, Boots, and head coverings are required in the facility.

 

User Fees: $100/day + supplies

To schedule use: nanotech@wfu.edu

 

 

Current Equipment Inventory
(some images provided by the manufacturers)























The "Alpha line": Glovebox fabrication equipment includes an operational glovebox system with a built in evaporator, spinners, balances, and hot plates.  Organic devices up to 3 in dia. can be fabricated fully within the system































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glove

glove

      Sputter Deposition System: BOSCH VS24CS Vertical 16" dim. Magnetron Sputtering System, 24"x12" chamber w/ dual 19" instrument rack, CTI CryoTorr 8 pump, side mounted, w/ high conductance valve, 2KW RF power supply with matching system. Magnetron source with RF Matching system, Temperature and Thickness control, Electro pneumatically actuated Valves, VCS vacuum system controller provides automatic valve sequencing, pressure readout and complete executive control of process, VSC can sense both analog and digital signals (RS-232c).
sputter


















Thermal Evaporators: Three thermal evaporators are available.  These are excellent for deposiion of organics and metal contacts (Al, Au, Ag, etc.)


evap









Ozone Cleaner: Ozone substrate cleaning for SiOx and ITO substrates
ozone























Spinners: Two spinners with multiple stage spin programs for the application of thin films and resist.
spinner









 




Ultrasonic baths and Ultrasonic probes: Ultrasonic baths and probes are available in a wide range of powers.
ultra









SMU test bed: Standard current voltage capabilities, while simple, are the most used techniques in a device lab.  The Center maintains several calibrated systems for standardized measurements.
test







Testbed for OLED performance: Lifetime tests with constant power, constant current, or voltage onstants can be done.
test
















AM1.5g standard (NIST calibrated source): Our photovoltaic testbed is calibrated using a NIST certified photodiode.  The Air Mass 1.5 global standard is widely accepted for determining photovoltaic efficiency.  External efficiency and EQE can be determined with this system.
OPV















4.2 K cryostat with optical access: ST-100 Cryostat Systems Optical continuous flow cryostat suitable for a wide range of applications: the window material and geometry can be specified to allow spectroscopy with excitation energies from gamma rays through to the far infrared.
stc











Noise spectrum analyzer: The SR760 is a single-channel, 100 kHz FFT Spectrum Analyzer with a dynamic range of 90 dB and a real-time bandwidth of 100 kHz. The SR770 includes a low-distortion (-80 dB), synthesized source which can be used to make frequency response measurements. It generates single frequency sine waves, two-tone signals for intermodulation distortion (IMD) testing, pink and white noise for audio and electronic applications, and frequency chirp for transfer function analysis. The SR760 is an ideal choice for a variety of applications including acoustics, vibration, noise measurement and general electronic use.
noise






UV lithography: The Center maintains mask fabrication, resist and photo-exposure capabilities for 1000 micron line widths.  These capabilities are ideal for pixellization technology, or other display schemes.

The OLED shown above was made with this system.
lb




 

Vacuum Ovens: Amb. +10 to 240 Deg C

vo

      Alpha Stepper: For measureing thin film thicknesses down to 1 nm resolution. This is an older instrument but recently refurbished and calibrated.
alpha step
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Wake Forest